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MEMS Silicon Oscillating Accelerometers and Readout Circuits

Edited by Yong Ping Xu
Hardback
March 2019
9788770220453
More details
  • Publisher
    River Publishers
  • Published
    21st March
  • ISBN 9788770220453
  • Language English
  • Pages 225 pp.
  • Size 6.125" x 9.20"
$110.00
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April 2019
9788770220446
More details
  • Publisher
    River Publishers
  • Published
    29th April
  • ISBN 9788770220446
  • Language English
  • Pages 225 pp.
  • Size 6.125" x 9.20"
$82.50

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.

MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Preface
1. Mechanical Design of Micromechanical Silicon Oscillating Accelerometer
2. Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers
3. MEMS Silicon Oscillating Accelerometer Readout Circuit
4. A MEMS Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter
5. A System-decomposition Model for MEMS Silicon Oscillating Accelerometer
6.Resonant Seismic Sensor
Author Index
Keyword Index

Yong Ping Xu

Yong Ping Xu is at National University of Singapore, Singapore.